Hot carrier injection (HCI) test of the MOSFET devices, electron migration (EM) test of the metal interconnects and gate oxide integrity (GOI) test are the most popular WLR test items.

• 半导体集成电路的晶圆级可靠性的主要测试项目包括MOS器件的热载流子注入测试、栅氧化层完整性测试以及金属互连线的电迁移测试。