Gas sensing property of the film was investigated at different concentration of CO gases and results show that 0.5% Al3+ doped ZnO(mol/mol) thin film shows a maximum sensitivity to CO gas. The gas sensitivity mechanism of ZnO is also discussed.

• 在室温下；对薄膜在不同浓度的CO气体下的敏感特性进行了研究；随着气体浓度的增加；薄膜电阻值逐渐减小; 随着掺Al量的增大；气敏灵敏性先逐渐增大后减小；发现当铝含量为r(Al:ZnO)=0.；5%25时；对CO气体的灵敏度最大；并对紫外光照射下气敏半导体薄膜的气敏机理进行了简单分析。