GUO Dong-ming,KANG Ren-ke,SU Jian-xiu,et al.Future development on wafer planarization technology in ULSI fabrication[J].Chinese J Mechan Eng,2003,39(10):100-105 (in Chinese).
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[3]郭东明;康仁科;苏建修;等.;超大规模集成电路制造中硅片平坦化技术的未来发展[J]
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