GUO Dong-ming,KANG Ren-ke,SU Jian-xiu,et al.Future development on wafer planarization technology in ULSI fabrication[J].Chinese J Mechan Eng,2003,39(10):100-105 (in Chinese).

• [3]郭东明；康仁科；苏建修；等.；超大规模集成电路制造中硅片平坦化技术的未来发展[J]