Furthermore, it could activate non-inert gas effectively and offer a great deal of active gas composition.They are easy to react with laser ablating production and form compound film forerunner.

• 对非惰性气体的ECR微波放电能有效激活气体，提供大量高化学活性的气相成分，它们易于与激光烧蚀产物反应，形成化合物薄膜的先驱物；