From the computer simulation of ellipsomerry, we found that the sensitivity of ellipsometer is enhanced when the angle of incidence is set to close the Brewster angle of the air/substrate system.

• 由椭圆偏振的计算机模拟计算得知,当所设入射角接近所甩空气/基底体系的Brewster角时,椭圆偏振仪的灵敏度最高;