For the metal Ti-SOS structure nano device. the thickness and characteristics of Ti film become very important factors in quality control of fabricating the Ti oxide line/circuit figures by AFM tip induced oxidation.

• 采用金属Ti-SOS结构的纳米器件,Ti膜的厚度和成膜质量成为影响基于AFM针尖诱导氧化加工Ti纳米氧化线/电路图形结构质量的重要因素。