Experiment results show that the display resolution limit of the TFTM system on lower reflectivity is 0.02% and the standard deviation of TFTM is 0.55%.

• 实验结果表明：膜厚监控系统的低反射率膜的反射率显示分辨极限为0.；02%25，膜厚控制的标准偏差为0