Due to the situation that ozone is limited to its solubility and mass transfer rate, it is still a challenge to replace PR stripping using SPM by ozonized water.

• 但是由于臭氧技术受限于溶解度与质传速度之限制，到目前为止，利用臭氧水来取代现行的光阻去除方法的研究中，有效增加去除效率依旧是一大挑战。