Doping Cr2O3 increase resistivity of ATO Doping ZnO reduce resistivity of ATO. After doping three oxide the transparency of ATO film is all reduced. Effect of oxide on transparency of ATO films followed the sequence Cr2O3> Fe2O3> ZnO.

• 结果表明；Cr2O3增大ATO纳米粉末晶粒尺寸；对ATO粉体电阻率急剧增加；搀杂ZnO增加ATO纳米粉末晶粒尺寸；但降低ATO粉末的电阻率；搀杂Fe2O3能大大减少ATO纳米粉末晶粒长大；当Fe2O3搀杂量超过一定值时使电阻率急剧上升；3种氧化物均降低ATO薄膜的透射率；其程度为Cr2O3>Fe2O3>ZnO.