Diamond like carbon (DLC), TiN, TiCN and AlN films had been successfully generated on the surface of 45 steel and single crystal samples.

• 我们成功地在单晶硅和45号钢等材料表面在室温条件下生成了类金刚石、氮化钛、氮碳化钛、氮化铝薄膜。