Diamond films were prepared by using the plasma assistant hot filament chemical vapor deposition (PAHFCVD).XRD and SEM characterizations were carried out to investigate the prepared diamond films.

• 摘要采用等离子辅助热丝化学气相沉积(PAHFCVD)装置，分别用甲烷和乙醇为碳源进行了金刚石薄膜的制备。