Diamond film produced DC arc plasma jet is measured by force driven static measuring ultra micr indentation system UMIS 2000.The result shows that hardness of diamond film is related to not only crystal growth direction but also thickness.

• 使用力驱动静态超微压痕测量仪器（Force Driven Static Measuring Ultra Micro－ Inden－tation System ）－ UMIS－ 2000 对由直流等离子体喷射法沉积的金刚石膜进行测量。 结果显示金刚石膜的硬度不仅与晶体生长方向和晶粒大小有关，还与厚度有关。