Decomposition of sample in polytetrafluoroethylene beaker and then determination of six elements with ICP AES were adopted.

• 拟定了用聚四氟乙烯烧杯分解试样，采用ICP－AES法同时测定工业硅及多晶硅中铁、铝、钙、硼、砷、磷六个元素。