DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.

• 为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题,提出在悬臂梁的顶端引入斜拉梁的方法。