Comparing to single rf source CCP, ion flux and electron flux will be influenced by both of the sources in the dually rf driven CCP.Therefore, particles in plasma behave more complicated.

• 与单频电容耦合放电相比,在双频电容耦合放电等离子体中的离子和电子受到的是两个不同频率的射频偏压的调制,从而使等离子体表现出更为复杂的运动行为。