Compared to other actuation mechanisms, electrostatic RF MEMS switches have small footprint, extremely low power consumption, high switching speed, and ease of integration with CMOS circuits.

• 然而传统上在射频前端系统的微波开关大都使用固态电子技术制造的场效电晶体或二极体，其优点为开关状态切换速度快，但效能会随著操作频率的提高而影响其表现。