Carbon on the silicon chips can be removed, automatically oscillated spraying guns in a number of 8-16 pieces are adopted, pressure of each spraying gun can be adjusted for on and off individually.

• 可去除矽晶片表面、碳化物、喷枪采自动遥摆，8到16支喷枪设计。每支喷枪可调压力或个别开或关。