By testing the mechanical characteristics of different surface of silicon wafer,chemical corrosion is found to be important to improve the mechanical characteristic of Si.

• 通过对不同表面状态的硅片力学性能的测试,得出化学腐蚀在改善硅片力学性能方面具有重要作用,适当的化学腐蚀工艺可以大幅减少硅片制备过程中的不良率。