By comparing with the results obtained from etch pits technique,the measurements of the dislocation densi-ty of the diamond crystal have been made by ECP technique of SEM.

• 本文应用扫描电镜的ECP技术对人造金刚石晶体表面的位错密度，进行了实验分析，并同位错蚀坑分析技术的测量结果进行了比较。