Blue|emitting porous silicon(PS) prepared by hydrothermal etching was treated by rapid thermal oxidation (RTO) process.

• 对用水热腐蚀技术制备的、具有蓝光发射的多孔硅样品在快速热氧化 (RTO)处理前后其光致发光谱、硅纳米颗粒的大小及尺寸分布变化进行了研究 .