Besides, by changing substrate as Ru or Pt/MgO, the RuO2 films will exhibit highly (200)-oriented films, no matter the O2 flow ratio, substrate temperature, and chemical bonding.

• 将基板种类由二氧化矽改成钌金属/二氧化矽基板及白金/氧化镁单晶基板，则二氧化钌薄膜呈现(200)优选指向，不受氧气流量比、基板温度及表面化学键结的影响。