Based on the working principle,the piezoelectric pump with active valve was designed and fabricated which used the piezoelectric vibrators as the prime mover and the inlet and outlet valves.

• 依据工作原理,设计、制作了由压电振子分别作为泵驱动源和进、出口阀的主动阀压电泵,并对泵的驱动信号进行了研究。