Based on the properties of BARC and low dielectric constant, the process reliability of these materials can be ensured and the process competence can be promoted.

• 由于此抗反射材料本身是由低介电常数材料所构成，因此在微影制程中可省去再外加抗反层的步骤，并增加制程的可靠度及竞争性。