Auger electron spectroscopy (AES), scanning electron microscopy (SEM) and atomic force microscopy (AFM) are used to analyze component and surface morphology of the films.

• 用俄歇电子能谱(AES)、扫描电镜(SEM)和原子力显微镜(AFM)对薄膜的组成成分和表面形貌进行了分析。