Au and Pt Dual doping technique is reported in this paper, which is compared with Au doping and Pt doping technique. The optimal technology will be chosen by comprehensive consideration of properties of all parameters of FRD.

• 本实验提出金铂双掺杂技术，与掺金和掺铂技术相比较，综合考虑快恢复二极管各个参数特性，选择制造快恢复二极管的最佳工艺。