At lower deposition temperature, the structure of ZrV2 thin film is amorphous state, then changed into the multiphase mixture of C14, C15 Laves-phases, a-Zr and V by the post-heat-treatment.

• 在较低的基片沉积温度下，ZrV2薄膜为非晶结构，通过热处理可获得由C14, C15, a-Zr 和 V组成的混合相薄膜结构。