As one of the key mutual databases of MEMS CAD, process database is a kernel module of process-level design in the MEMS integrated design platform (MEMS GARDEN 3.0) and required to computer-aided design for MEMS, which has important applied value.

• MEMS加工工艺数据库是MEMS CAD的关键交互数据库之一；同时也是微机电系统集成平台(MEMS GARDEN 3.；0)工艺级重要模块；是实现计算机辅助设计的必要条件；因此对该数据库的研究具有重要的应用价值。