As a functional material, TiNi shape memory alloy thin film has the characteristics of large stress, strain and high work density. It is a perfect micro-actuator candidate for the micro-electrical mechanical system (MEMS).

• TiNi形状记忆合金薄膜被认为是目前微机械领域中较有发展前景的一种大应力、应变和高单位功密度的微驱动器材料，对它的研究和开发必将推动微电子机械系统的发展，为人类探索和操作微观世界提供一种有效的工具。