Application of TP86A single board computer to stage system of variable rectangular E-beam lithography, including hardware of interface and Software package design for controlling stage travel, adjustment and positioning accuracy testing.

• 本文介绍了TP86A单板机在可变矩形电子束曝光机工件台系统中的应用。 其中包括接口部份的硬件以及对工件台运动的控制,调试和定位精度检测用的软件包设计。