Another noteworthy feature is that the inhomogeneous oxidation of as-deposited HfN film is examined and transferred into the homogeneous HfOxNy film after thermal annealing.

• 另一个值得注意的现象是对于刚沉积的氮化铪薄膜中，即已经出现了不均匀的氧化，但经过后续的高温制程处理将转变成为均匀的氮氧化铪薄膜。