An integrated fluorine supply strategy has been demonstrated to be the most effective means of implementing a safe and reliable fluorine supply to users seeking a low-cost replacement for standard chamber clean chemistries.

• 对一般气相沉积反应器清洗而言，一体化氟气供应策略，对寻求低价取代方案的使用者而言，是最安全和稳定的供应方式。