Advanced by the new-high technology and draught by the strong market demand, various micro sensors and MEMS made on the basis of integrated circuit technology and micro machining processing technology come to the force in the competition.

• 微电子机械系统(MEMS)技术是建立在微米/纳米技术(micro/nanotechnology)基础上的21世纪前沿技术，是指对微米/纳米材料进行设计、加工、制造、测量和控制的技术。 它可将机械构件、光学系统、驱动部件、电控系统集成为一个整体单元的微型系统。