According to vector diffraction theory,the optical field incident on a facet of a solid immersion lens(SIL) is the integral of the angular spectrum, which is decomposed into TE and TM waves.

• 从矢量衍射理论出发,将入射到固体浸没透镜(SIL)底面的光场看成角谱积分形式,并将角谱分量分解为TE波和TM波,从而用隧道薄膜的特性矩阵方法求出相应的反射角谱分量。