Abstract: MEMS (Micro-Electro-Mechanical Systems), a developing technology in the microwave and millimeter wave field is introduced in this paper. Some typical illustrations for the application are given also.

• 文摘:介绍微机电系统(MEMS)这一新兴技术及其在微波和毫米波领域的应用。给出几种典型部件示例。