Abstract: In this paper, the property of silicon micro capacitive accelerometer is analyzed and discussed by establishing the model of sensor, laying the foundation for optimization design of sensor system structure.

• 文摘:通过建立传感器的力学模型，对硅微电容式加速度传感器的特性作了详细的分析与讨论，为系统结构的优化设计提供了理论基础。