Abstract: A test system of thermal diffusivity of thin films based on AC calorimetric method was described, which carried out automated measurement of thermal diffusivity of thin films.

• 文章摘要: 设计并组建了一套基于交流量热法的薄膜热扩散率的自动测试系统，实现了薄膜热扩散率的自动化测量。