A novel technique has been successfully developed to calibrate the ultra high vacuum(UHV) and extra high vacuum(XHV),which consists of XHV/UHV chambers,a flow separation and a gas supply.

• 超高/极高真空校准装置由极高真空(XHV)系统、超高真空(UHV)系统、流量分流系统和供气系统四部分组成。