A novel acceleration sensor with overload protection was proposed, which was based on the vacuum electronic technology, the Micro Electro-Mechanical Systems (MEMS) technology, the sensor technology and the principle of Cold Electrode Field Emission.

• 结合真空微电子技术、MEMS技术和传感器技术,依据冷阴极场致发射的原理,设计了一种带过载保护功能的新型真空微电子加速度传感器。