A monolithic MEMS triaxial accelerometer based on lead zirconate titanate(PZT)thin films with highly symmetric quad-beams and a seismic mass has been designed and simulated.

• 设计了一种基于MEMS的单片三维压电薄膜加速度传感器,传感器采用单一质量块和四方梁的高度对称结构。