A lumped parameter model was developed for predicting the transient motion of mirrors, taking into account electrostatic and tensile forces and viscous air damping via squeeze film theory.

• 考虑静电驱动力、张力和空气阻尼衰减对变形镜回复过程的影响，建立一种复合参数模型来预测变形镜的瞬态行为。