A lotof experiments have demonstrated that thewritten device is satisfied for the servo deco-de written demand of the etched servo disk,and it is hopeful that the etched servo diskwould be used in practical drive disk.

• 实验结果表明；所研究的刻写装置适合光刻伺服盘伺服编码刻写要求；为光刻伺服盘进一步实用化打下了基础.