A dynamic testing system for micro-electro-mechanical systems (MEMS) devices was developed which combines autofocus and machine microvision with stroboscopic imaging to measure in-plane and out-of-plane motions of MEMS devices.

• 为了对微机电系统(MEMS)的机械动态性能进行测试,结合自动调焦、机器显微视觉和频闪照明成像等多项技术,设计了基于自动调焦显微视觉的MEMS动态测试系统,可进行MEMS平面运动和离面运动的测量。 该文介绍了系统的设计组成和关键技术,并针对系统做了验证性实验。