A calibrated He-Ne laser and a mechanical chopper producing a modulated frequency are used to measure the voltage responsivity of ZnO pyroelectric sensors.

• 及溅镀机沈积氧化锌焦电薄膜。焦电感测器量测方式主要以氦氖雷射，搭配断波器控制红外线的频率，来量测焦电感测器的电压响应。