A Si/Mo noncrystalline multilayer film sample was cut into two equal pieces in surface area for two times SIMS depth profile analysis by using RAS POINT MODE and POINT MODE respectively.

• 本文主要介绍了辉光放电光谱仪的分析原理、分析特点以及在钢铁分析中的两个主要应用 :基板分析和深度剖面分析。