论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺.
释义
更多
In this paper, the Damascene Cu interconnecting integration technology, low-k dielectric materials and barrier materials in Cu interconnecting integration technology are introduced.
近反义词
把海词放在桌面上,查词最方便
触屏版
|
电脑版
©2003 - 2024 海词词典(Dict.cn)
立即下载