用高质量减少辉光放电质谱仪测量电子级铝铜、铝硅和铝铜硅中微量金属杂质的标准试验方法

• Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum-Copper, Aluminum-Silicon, and Aluminum-Copper-Silicon Alloys by High-Mass-Reduction Glow Discharge Mass Spectrometer